"Embedded Firmware Diversity for Smart Electric Meters"
"Hardware and Binary Modification Support for Code Pointer Protection From Buffer Overflow"
"G-Free: Defeating Return-Oriented Programming through Gadget-less Binaries"
"HyperSafe: A Lightweight Approach to Provide Lifetime Hypervisor Control-Flow Integrity"
"Preventing memory error exploits with WIT"
"Control-Flow Integrity Principles, Implementations, and Applications" (in general, MSR's gleipnir project and the related papers)
"Automated Detection of Persistent Kernel Control-Flow Attacks"
of course this is just a small selection, this area of research goes back to decades (no, it didn't start in security ;-).